上海玲荣科技研发中心
NOVELLUS C1 Teos
VARIAN M2i
A2 - Etch w/ Comdel CPS1001 RF power supply,
A3 - Cobalt w/ Varian Multi Range DC Power Supply 3-12kW,
A4 - Ti/TTN w/Varian Multi Range DC Power Supply 6-24kW,
A5 - Al w/ Varian Multi Range DC Power Supply 3-12kW,
A6 -Ti/TTN w/Varian Multi Range DC Power Supply 3-12kW,
CTI Cryogenics 9600 Compressors (qty 4),
Neslab Coolflow System IV 230V 3 phase, and
Infincon CIS TS100 RGA units on A2-A6 and transfer.
(All workbenches, flat panel monitors and various nonrelated items in photos may not be included)
Lesker sputtering
Feature:
2 targets,
complete used very little.
Manual unit good for lab.
Toshiba / NUFLARE EGV-28FM 零件贩卖
Toshiba / NUFLARE EGV-28FM Parts
以下这些配件目前在台湾的 FAB，如果您有兴趣请通知我们，谢谢您?
|
料號 |
品名 |
設備廠商 |
設備型號 |
原廠料號 |
PART_ |
|
30010011 |
DC BUS BAR P/N:930122 |
Nuflare |
EGV-28FM |
930122 |
Assembly |
|
31230002 |
MFC, MASS FLOW CONTROLLER5 slm/SiHCL3 ,I/P&O/P接頭均1/4" |
Nuflare |
EGV-28FM |
- |
MFC |
|
31230018 |
SUSCEPTOR HOLDER P/N:L422857 For (EM1) (EGV-28FM 專用) |
Nuflare |
EGV-28FM |
L422857 |
Quartz/Sic |
|
31230020 |
Coil Cover #L422835 EGV-28FM (易碎品) |
Nuflare |
EGV-28FM |
L422835 |
Quartz/Sic |
|
31230021 |
Cover Support #S825831 EGV-28FM(易碎品) |
Nuflare |
EGV-28FM |
S825831 |
Quartz/Sic |
|
31230024 |
(戰)QUARTZ BELL JAR FOR (EGV-28FM) P/N:L474655(ATM) FOR TR110 (改用31230025) |
Nuflare |
EGV-28FM |
L474655 |
Quartz/Sic |
|
31230039 |
Toshiba Sub Exhaust Repair Kit 鐵弗龍（附VT-oring ）外徑78.9 內徑49.6 厚度9 , 附墊片1.5t×2只、0.5t×2只、1t×1只、襯套1只 (EGV-28FM) (mini order*4set) |
Nuflare |
EGV-28FM |
- |
Tool |
|
31230045 |
NOZZLE 28M-6(P/N: #L577590)(易碎品) |
Nuflare |
EGV-28FM |
L577590 |
Quartz/Sic |
|
31230046 |
TR110專用氣動閥接頭為 Swagelok 1/4" #SS-4BK-1C Swagelok Tube Fitting SC-11 ,SS Bellows-Sealed Valve,Gasketed,PC TFE Stem Tip(替代31570344) |
Nuflare |
EGV-28FM |
SS-4BK-1C |
Valve |
|
31230047 |
TR110專用氣動閥接頭為 Swagelok 1/4" #SS-4BK-1O Swagelok Tube Fitting SC-11 ,SS Bellows-Sealed Valve,Gasketed,PC TFE Stem Tip |
Nuflare |
EGV-28FM |
SS-4BK-1O |
Valve |
|
31230048 |
TR110專用氣動閥接頭為 Swagelok 3/8" #SS-6BK-1C Swagelok Tube Fitting SC-11 ,SS Bellows-Sealed Valve,Gasketed,PC TFE Stem Tip |
Nuflare |
EGV-28FM |
SS-6BK-1C |
Valve |
|
31230049 |
TR110專用氣動閥接頭為 Swagelok 3/8" #SS-6BK-1O Swagelok Tube Fitting SC-11 ,SS Bellows-Sealed Valve,Gasketed,PC TFE Stem Tip |
Nuflare |
EGV-28FM |
SS-6BK-1O |
Valve |
|
39960142 |
RF Coil for Toshiba EGV-28FM (705) (4 legs, 15 turns) #E68867G03 整組(包含screw bolts, ceramics plate, Ni coating, Assembly working fee,Inspection working fee in NuFlare) |
Nuflare |
EGV-28FM |
E68867G03 |
Assembly |
|
32990460 |
Susceptor Support Shaft (改良型加厚版熱板支撐架) |
AMAT |
Centura 5200HT |
0200-00412 |
Quartz/Sic |
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